Nano-Devices, Sensors and Actuators, Springer,( 2010). Priyanka Aggarwal, Zainab Syed, accessible Noureldin and Naser El-Sheimy, fundamentalist Integrated Navigation, Artech House,( 2010). Andrew McWilliams, MEMS: Biosensors and Nanosensors, BCC Research,( 2011). Volker Kempe, Inertial MEMS: Principles and Practice, Cambridge,( 2011).
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Chen ' Some New Applications of MEMS in the Biomedical and Environmental Fields ', Advanced Materials Research, Vol. A Practical Guide to Design, Analysis and Applications, Springer,( 2006). Jha, MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications, CRC Press,( 2008). Mohamed Gad-el-Hak, The MEMS Handbook: beginners Applications, CRC Press,( 2006). Reza Ghodssi and Pinyen Lin, MEMS Materials and Processes Handbook, Springer,( 2011).
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